Characterization of removal mechanisms in LiTaO3 single crystals under various polishing techniques: A comparative study using nanoindentation and nanoscratch techniques

作者：Wei Hang, Zhengye Lai, Lingwei Wu, Hongyu Chen, Yong Li, Weijun Zhu, Kun Cui, Wei Song, Xuxia Shi, Yi Ma · 发表于：Materials Science and Engineering B · 年份：2025 · DOI：10.1016/j.mseb.2025.118166 · 被引用次数：3 · 研究领域：Advanced Surface Polishing Techniques、Semiconductor materials and devices、Metal and Thin Film Mechanics