Microdynamic behaviors of Au/Ni-assisted chemical etching in fabricating silicon nanostructures

作者：Wenxuan Wu, Yun Chen, Bin Xie, Hengxu Wu, Liang Cheng, Yuanhui Guo, Chuhao Cai, Maoxiang Hou, Xin Chen · 发表于：Applied Surface Science · 年份：2025 · DOI：10.1016/j.apsusc.2025.162915 · 被引用次数：45 · 研究领域：Nanowire Synthesis and Applications、Advancements in Semiconductor Devices and Circuit Design、Silicon Nanostructures and Photoluminescence