3D Femtosecond Laser Beam Deflection for High‐Precision Fabrication and Modulation of Individual Voxelated PCM Meta‐Atoms (Adv. Sci. 9/2025)

作者：Weina Han, Donghui Wei, Biye Peng, Jianhui Jiang, Jintao Tong, Zhehao Xu, Xueyan Zou, Jie Hu, Cheng Qian, Lan Jiang · 发表于：Advanced Science · 年份：2025 · DOI：10.1002/advs.202570058 · 研究领域：Laser Material Processing Techniques

3D Femtosecond Laser Beam DeFLection In article number 2413316, Lan Jiang and co-workers present a PCM-only metasurface constructed entirely of phase-change material voxels. The three-dimensional beam deflection method combines femtosecond laser phase modulation with 200 nm processing precision, enabling atomic-level control of PCM meta-atoms. This breakthrough technique advances highprecision metasurface fabrication and dynamic optical modulation capabilities.