Hollow fiber-based strain sensors with desirable modulus and sensitivity at effective deformation for dexterous electroelastomer cylindrical actuator

作者：Yang Zhang, Keqi Deng, Tingting Shen, Yong Huang, Zhenjin Xu, Jinhui Zhang, Hang Jin, Xin Liu, Lida Xu, Lianjie Lu, Shiying Li, Daoheng Sun, Dezhi Wu · 发表于：Microsystems & Nanoengineering · 年份：2025 · DOI：10.1038/s41378-025-00878-7 · 被引用次数：4 · 研究领域：Advanced Sensor and Energy Harvesting Materials、Dielectric materials and actuators、Advanced Materials and Mechanics

The electroelastomer cylindrical actuators, a typical representation of soft actuators, have recently aroused increasing interest owing to their advantages in flexibility, deformability, and spatial utilization rate. Proprioception is crucial for controlling and monitoring the shape and position of these actuators. However, most existing flexible sensors have a modulus mismatch with the actuation unit, hindering the free movement of these actuators. Herein, a low-modulus strain sensor based on laser-induced cellular graphitic flakes (CGF) onto the surface of hollow TPU fibers (HTF) is present. Through the electrostatic self-assembly technology, the flexible sensor features a unique hybrid sensing unit including soft HTF as substrate and rigid CGF as conductive path. As a result, the sensor simultaneously possesses desirable modulus (~0.155 MPa), a gauge factor of 220.3 (25% < ε < 50%), fast response/recovery behaviors (31/62 ms), and a low detection limit (0.1% strain). Integrating the sensor onto the electroelastomer cylindrical actuators enables precise measurement of deformation modes, directions, and quantity. As proof-of-concept demonstrations, a prototype soft robot with high-precision perception is successfully designed, achieving real-time detection of its deformations during the crawling process. Thus, the proposed scheme sheds new light on the development of intelligent soft robots.