Recent progress in photolithography technique to fabricate micro-supercapacitors

作者：Yu Xia, Xinyi Luo, Weihe Shen, Meichen Pan, Tongkun Wei, Xuan Yao, Xin Wang, Jingye Sun, Mingqiang Zhu, Tao Deng, Yang Zhao, Chang Gao · 发表于：Journal of Energy Storage · 年份：2025 · DOI：10.1016/j.est.2025.115862 · 被引用次数：10 · 研究领域：Supercapacitor Materials and Fabrication、Advanced Sensor and Energy Harvesting Materials、Electrospun Nanofibers in Biomedical Applications