Terahertz metasurface temperature sensors based on strontium titanate films prepared by RF magnetron sputtering and air annealing

作者：Yonggang Zhang, Zhaoyang Shi, Lanju Liang, Zhiguo Wang, Xin Yan, Haiyun Yao, Zhenhua Li, Xiaofei Hu, Yuanping Li, Jintao Wu, Shiwu Ma, Q.P. Wang, Yongzhen Chen, Huihan Tian, Xingyu Zhang, Fei Huai · 发表于：Photonics Research · 年份：2025 · DOI：10.1364/prj.543126 · 被引用次数：9 · 研究领域：Terahertz technology and applications、Superconducting and THz Device Technology、Metamaterials and Metasurfaces Applications

A terahertz temperature sensor is developed by combining an Al metasurface with polycrystalline strontium titanate (STO) prepared by RF magnetron sputtering and air annealing. Leveraging the excellent dielectric properties of STO, we design terahertz temperature sensors based on amorphous and polycrystalline STO. In the temperature range of 300–620 K, as the temperature increases, the transmission curve of the amorphous STO temperature sensor only exhibits a frequency shift phenomenon. Owing to the different lattice structures, the dielectric response of polycrystalline STO causes frequency shifts and significant amplitude changes in the transmission curve, indicating that it has dual-dimensional temperature sensing capabilities. Through quantitative analysis, a dual-dimensional polycrystalline STO terahertz temperature sensor with the maximum sensitivity of 0.21 GHz/K and maximum transmittance of 13% is obtained. This study not only provides a new strategy for the application of polycrystalline STO in the development of terahertz temperature sensors but also demonstrates that such sensors are characterized by excellent performance, low cost, and ease of processing.