Self-healing behavior in high-deposition-rate sputtered Al·Al2O3 nanocomposite coatings for enhanced corrosion resistance

作者：Lexiang Yin, Chenyang Wang, Pei Li, Fanping Meng, Ping Zhu, Feng Huang, Fangfang Ge, Xuewen Xu, Peng Li · 发表于：Vacuum · 年份：2025 · DOI：10.1016/j.vacuum.2025.114134 · 被引用次数：5 · 研究领域：Metal and Thin Film Mechanics、Diamond and Carbon-based Materials Research、High-Temperature Coating Behaviors

PVD coatings have limitations as corrosion-resistant coatings mainly because the rapid condensation resulting in insufficient atoms diffusion during the vapor deposition process leads to non-dense coating growth, preventing the coating from completely isolating corrosive agents. The mid-frequency Al target magnetron reactive sputtering method, by precisely controlling the O 2 flow rate, has produced a nanocomposite coating consisting of nano-Al and amorphous Al 2 O 3 . During the corrosion process, the nano-Al gradually oxidizes, filling the pinholes, thus providing a self-healing effect that completely isolates the corrosive agents. This results in the coating exhibiting significantly improved corrosion resistance, enhancing the corrosion resistance by 10 orders of magnitude compared to 304 stainless steels .