Fluorescent nanodiamond scintillators for beam diagnostics of EUV and soft X-ray in photolithographic applications

作者：Yuen Yung Hui, Chen-Yu Ho, Teng‐I Yang, Tzu-Ping Huang, Bing‐Ming Cheng, Yin‐Yu Lee, Huan‐Cheng Chang · 发表于：RSC Advances · 年份：2025 · DOI：10.1039/d4ra08013k · 被引用次数：3 · 研究领域：Diamond and Carbon-based Materials Research、Ion-surface interactions and analysis、High-pressure geophysics and materials

, approximately eight times lower than that of an f/1.0 lens-coupled system. This enhanced sensitivity makes the FND/FOP-based detection system useful for beam profiling of various EUV/SXR radiation sources. Our results highlight the promising potential of electrosprayed FND scintillators as a cost-effective and versatile diagnostic tool for advancing next-generation photolithography.