A novel liquid film shearing polishing technique for silicon carbide and its processing damage mechanisms

作者：Hongyu Chen, Hongbing Wan, Binbin Hong, Wei Hang, Te Zhu, Peng Zhang, Xingzhong Cao, Qiu Xu, Rong Wang, Xuefeng Han, Binghai Lyu · 发表于：Applied Surface Science · 年份：2025 · DOI：10.1016/j.apsusc.2025.162317 · 被引用次数：32 · 研究领域：Advanced Surface Polishing Techniques、Advanced machining processes and optimization、Metal and Thin Film Mechanics