12-Spin-Qubit Arrays Fabricated on a 300 mm Semiconductor Manufacturing Line

作者：Hubert C. George, Mateusz Mądzik, Eric Henry, Andrew Wagner, Mohammad Monirul Islam, Felix Borjans, Elliot J. Connors, J. Corrigan, Matthew Curry, M. Harper, Daniel Keith, Lester Lampert, Florian Luthi, Fahd A. Mohiyaddin, Sandra Murcia, Rohit Nair, Rambert K. Nahm, Aditi Nethwewala, Samuel F. Neyens, Bishnu Patra, Roy D. Raharjo, Carly Rogan, Rostyslav Savytskyy, Thomas F. Watson, Josh Ziegler, Otto Zietz, Stefano Pellerano, R. Pillarisetty, N. C. Bishop, Stephanie A. Bojarski, J. M. Roberts, James S. Clarke · 发表于：Nano Letters · 年份：2024 · DOI：10.1021/acs.nanolett.4c05205 · 被引用次数：51 · 研究领域：Quantum and electron transport phenomena、Quantum Computing Algorithms and Architecture、Quantum-Dot Cellular Automata

Intel's efforts to build a practical quantum computer are focused on developing a scalable spin-qubit platform leveraging industrial high-volume semiconductor manufacturing expertise and 300 mm fabrication infrastructure. Here, we provide an overview of the design, fabrication, and demonstration of a new customized quantum test chip, which contains 12-quantum-dot spin-qubit linear arrays, code named Tunnel Falls. These devices are fabricated using immersion and extreme ultraviolet lithography (EUV), along with other standard high-volume manufacturing (HVM) processes as well as production-level process control. We present key device features and fabrication details as well as qubit characterization results confirming device functionality. These results corroborate our fabrication methods and are a crucial step toward scaling of extensible 2D qubit array schemes.