Effect of oxygen flow rate on magnetron-sputtering-based preparation and photoelectric properties of vanadium dioxide films

作者：Chuandong Zhang, Yuanjun Guo, Zhenhuai Yang, Lei Liu, Kesheng Guo, Jie Bai, Hong Liu, Yongneng Xiao, Lang Hu, Qiang Hu, Qiang Wang · 发表于：Thin Solid Films · 年份：2024 · DOI：10.1016/j.tsf.2024.140595 · 被引用次数：10 · 研究领域：Transition Metal Oxide Nanomaterials、Gas Sensing Nanomaterials and Sensors、Ga2O3 and related materials