Zirconium and/or cerium-containing mesoporous silica as functional active abrasive particles for radical-facilitated chemical mechanical polishing

作者：Zichen Tang, Yang Chen, Wenjin Zhou, Luning Zhong, Ailian Chen · 发表于：Journal of Alloys and Compounds · 年份：2024 · DOI：10.1016/j.jallcom.2024.178090 · 被引用次数：14 · 研究领域：Advanced Surface Polishing Techniques、Catalytic Processes in Materials Science、Polymer Surface Interaction Studies