Molecular dynamics study on burr formation mechanism during monocrystalline silicon nano-grinding process

作者：Ziteng Li, Shuhao Kang, Huan Liu, Yuhu Liu, Mingjun Ren, Xinquan Zhang, Li‐Min Zhu, Duo Li · 发表于：Journal of Manufacturing Processes · 年份：2024 · DOI：10.1016/j.jmapro.2024.10.054 · 被引用次数：12 · 研究领域：Advanced Surface Polishing Techniques、Advanced machining processes and optimization、Nanofabrication and Lithography Techniques