Investigation on high-aspect-ratio silicon carbide ceramic microchannel by using waterjet-assisted laser micromachining

作者：Jinjin Han, Linpeng Tong, Bin He, Linglei Kong, Qilin Li, Denglong Wang, Kai Ding, Weining Lei · 发表于：The International Journal of Advanced Manufacturing Technology · 年份：2024 · DOI：10.1007/s00170-024-14354-5 · 被引用次数：12 · 研究领域：Laser Material Processing Techniques、Nonlinear Optical Materials Studies、Laser-Ablation Synthesis of Nanoparticles