Two-Photon 3D-Printed Fabry–Pérot Interferometric Sensor for Ultrasensitive High-Frequency Ultrasonic Detection

作者：Jialin Wen, Tianyu Yang, Zeyu Zheng, Tingwei Xi, Zihan Liu, Heming Wei, Linfeng Lan, Weifeng Deng, Huanhuan Liu, Chunlei Yang, Yuming Dong · 发表于：Journal of Lightwave Technology · 年份：2024 · DOI：10.1109/jlt.2024.3454224 · 被引用次数：15 · 研究领域：Photoacoustic and Ultrasonic Imaging、Flow Measurement and Analysis、Ultrasonics and Acoustic Wave Propagation

A novel fiber extrinsic Fabry-Pérot interferometric ultrasonic sensor for detecting high-frequency ultrasonic signals is proposed and fabricated. The diaphragm structure features an anti-outer-ring clover design. Finite element simulation is employed to determine optimal parameters before directly printing the sensor onto the fiber tip using two-photon 3D printing technique. Experimental results indicate that the sensor achieves a signal-to-noise ratio of 67 dB@300 kHz, a mechanical sensitivity of 1362 nm/kPa, and a noise equivalent acoustic signal level of 3.98$\mu$Pa/Hz$^{1/2}$@300 kHz. The proposed fiber sensor offers a new approach for sensing weak ultrasonic signals and is expected to be applied in various ultrasonic detection fields.