Evaluation of chemical mechanical polishing characteristics using mixed abrasive slurry: A study on polishing behavior and material removal mechanism

作者：Xiaoxiao Zhu, Juxuan Ding, Zhangchao Mo, Xuesong Jiang, Jifei Sun, Hao Fu, Yuziyu Gui, Boyuan Ban, Li-Xiao Wang, Jian Chen · 发表于：Applied Surface Science · 年份：2024 · DOI：10.1016/j.apsusc.2024.161157 · 被引用次数：45 · 研究领域：Advanced Surface Polishing Techniques、Diamond and Carbon-based Materials Research、Advanced machining processes and optimization