Experimental study of key factors on super smooth surface fabrication upon single crystal silicon based on mechanochemical synergy

作者：Xiao Shen, Xiaoyu Weng, Yancheng Li, Ye Tian, Xing Peng, Ying Xiong, Shuo Qiao, Feng Shi · 发表于：Tribology International · 年份：2024 · DOI：10.1016/j.triboint.2024.110199 · 被引用次数：10 · 研究领域：Advanced Surface Polishing Techniques、Diamond and Carbon-based Materials Research、Force Microscopy Techniques and Applications