Deep learning-driven digital inverse lithography technology for DMD-based maskless projection lithography

作者：Jingtao Chen, Yuan-Yuan Zhao, Xu Guo, Xuan‐Ming Duan · 发表于：Optics & Laser Technology · 年份：2024 · DOI：10.1016/j.optlastec.2024.111578 · 被引用次数：19 · 研究领域：Advancements in Photolithography Techniques、Nanofabrication and Lithography Techniques、Image Processing Techniques and Applications