A fast ramp-up framework for wafer yield improvement in semiconductor manufacturing systems

作者：Hongwei Xu, Qihua Zhang, Yan‐Ning Sun, Qun-Long Chen, Wei Qin, Youlong Lv, Jie Zhang · 发表于：Journal of Manufacturing Systems · 年份：2024 · DOI：10.1016/j.jmsy.2024.07.001 · 被引用次数：27 · 研究领域：Advancements in Photolithography Techniques、Industrial Vision Systems and Defect Detection、Silicon and Solar Cell Technologies