Monolithic three-dimensional integration of complementary two-dimensional field-effect transistors

作者：Rahul Pendurthi, Najam U Sakib, Muhtasim Ul Karim Sadaf, Zhiyu Zhang, Yongwen Sun, Chen Chen, Darsith Jayachandran, Aaryan Oberoi, Subir Ghosh, Shalini Kumari, Sergei P. Stepanoff, Divya Somvanshi, Yang Yang, Joan M. Redwing, Douglas E. Wolfe, Saptarshi Das · 发表于：Nature Nanotechnology · 年份：2024 · DOI：10.1038/s41565-024-01705-2 · 被引用次数：139 · 研究领域：Semiconductor materials and devices、Advancements in Semiconductor Devices and Circuit Design、Semiconductor Quantum Structures and Devices