Photocatalytic assisted chemical mechanical polishing for silicon carbide using developed ceria coated diamond core-shell abrasives

作者：Xiaoxiao Zhu, Yuziyu Gui, Hao Fu, Juxuan Ding, Zhangchao Mo, Xuesong Jiang, Jifei Sun, Boyuan Ban, Ling Wang, Jian Chen · 发表于：Tribology International · 年份：2024 · DOI：10.1016/j.triboint.2024.109827 · 被引用次数：44 · 研究领域：Advanced Surface Polishing Techniques、Diamond and Carbon-based Materials Research、Advanced machining processes and optimization