Monolithic three-dimensional tier-by-tier integration via van der Waals lamination

作者：Donglin Lu, Yang Chen, Zheyi Lu, Likuan Ma, Quanyang Tao, Zhiwei Li, Lingan Kong, Liting Liu, Xiaokun Yang, Shuimei Ding, Xiao Liu, Yunxin Li, Ruixia Wu, Yiliu Wang, Yuanyuan Hu, Xidong Duan, Lei Liao, Yuan Liu · 发表于：Nature · 年份：2024 · DOI：10.1038/s41586-024-07406-z · 被引用次数：130 · 研究领域：Photonic Crystals and Applications、Advanced Sensor and Energy Harvesting Materials、2D Materials and Applications