Effects of growth temperature on phase transformation and crystal quality of Ga2O3 films grown on Si/AlN composite substrates by MOCVD

作者：Yu Hu, Li Zhang, Tiwei Chen, Zijing Huang, Botong Li, Huanyu Zhang, Gaofu Guo, Dengrui Zhao, Kun Xu, Xiaodong Zhang, Wenhua Shi, Zhongming Zeng, Baoshun Zhang · 发表于：Materials Science in Semiconductor Processing · 年份：2024 · DOI：10.1016/j.mssp.2024.108453 · 被引用次数：15 · 研究领域：Ga2O3 and related materials、Advanced Photocatalysis Techniques、ZnO doping and properties