Monolithic Integrated Interface ASIC With Quadrature Error Correction for MEMS Dual-Mass Vibration Gyroscope

作者：Huan Zhang, Liang Yin, Weiping Chen, Qiang Fu, Wenbo Zhang · 发表于：IEEE Sensors Journal · 年份：2024 · DOI：10.1109/jsen.2024.3387446 · 被引用次数：7 · 研究领域：Advanced MEMS and NEMS Technologies、Acoustic Wave Resonator Technologies、Mechanical and Optical Resonators

A novel design method of monolithic integrated interface circuit with quadrature error correction for micro-electromechanical system (MEMS) dual-mass vibratory gyroscope is proposed in this article. The source and effect of quadrature error of MEMS gyroscope are analyzed. The gyroscope system-level model is established, the gyroscope system with quadrature error correction is simulated by the system-level model, and the quadrature loop system stability and bandwidth are analyzed. The interface application specific integrated circuit (ASIC) chip with quadrature error correction has an area of 4.3 mm × 4.3 mm and a power consumption of 90 mW. After adding coupling stiffness correction circuit, the scale factor of the gyroscope is changed from 43 mV/◦/s to 40 mV/◦/s, the nonlinearity is reduced from 1326.7 ppm to 150.6 ppm, the angular random walk (ARW) is reduced from 0.25◦/√h to 0.028◦/√h, and the bias instability (BI) is reduced from 3.25◦/h to 0.29◦/h. Through comparison tests, the integrated interface ASIC chip with quadrature correction function has better performance. This monolithic integrated interface circuit can provide a highly integrated circuit design solution for MEMS vibration gyroscope’s broad application.