The influence of cracks in the coupling region of micro-grinding and laser stealth combined dicing on the quality of cutting side walls

作者：Jie Li, Fu Liu, Wei Zhou, Yi Zhang · 发表于：Journal of Manufacturing Processes · 年份：2024 · DOI：10.1016/j.jmapro.2024.04.020 · 被引用次数：21 · 研究领域：Advanced Surface Polishing Techniques、Integrated Circuits and Semiconductor Failure Analysis、Laser Material Processing Techniques