Synergistic effect of abrasive friction and glycine on improving chemical mechanical polishing performance of single-crystal GaN substrate

作者：Congming Ke, Shoulin Liu, Yiao Pang, Yongping Wei, Yaping Wu, Qiufa Luo, Yueqin Wu, Jing Lü · 发表于：Ceramics International · 年份：2024 · DOI：10.1016/j.ceramint.2024.03.247 · 被引用次数：25 · 研究领域：Metal and Thin Film Mechanics、MXene and MAX Phase Materials、Diamond and Carbon-based Materials Research