Three anionic surfactants for corrosion inhibition in cobalt CMP: Research on validity and mechanism

作者：Fangyuan Wang, Shihao Zhang, Baimei Tan, Yunhui Shi, Xiaolong Wang, Haoyu Du, Renhao Liu, Xinyu Han · 发表于：Surfaces and Interfaces · 年份：2024 · DOI：10.1016/j.surfin.2024.104202 · 被引用次数：29 · 研究领域：Advanced Surface Polishing Techniques、Advanced materials and composites、Corrosion Behavior and Inhibition