Gate recurrent unit neural network based high-precision feedforward control for piezoelectric nanopositioning stage

作者：Bingyang Hou, Ze Wang, Chuxiong Hu, Yu Zhu · 发表于：Engineering Applications of Artificial Intelligence · 年份：2024 · DOI：10.1016/j.engappai.2024.108126 · 被引用次数：20 · 研究领域：Piezoelectric Actuators and Control、Iterative Learning Control Systems、Advanced machining processes and optimization