Micro- to nano-scale topographical etching of diamond substrate via anisotropically atomic removal

作者：Yuqing Shi, Zhaojie Chen, Hao Yang, Jin Xie, Jingxiang Xu · 发表于：Applied Surface Science · 年份：2024 · DOI：10.1016/j.apsusc.2024.159589 · 被引用次数：4 · 研究领域：Diamond and Carbon-based Materials Research、Advanced Surface Polishing Techniques、Force Microscopy Techniques and Applications