Effect of Free Radicals on Irradiation Chemistry of a Double-Coordination Organotin (Sn 4 ) Photoresist by Adjusting Alkyl Ligands

作者：Hao Chen, Yifeng Peng, Haichao Fu, Fuping Han, Guangyue Shi, Feng Luo, Jun Zhao, Danhong Zhou, Pengzhong Chen, Xiaojun Peng · 发表于：CCS Chemistry · 年份：2024 · DOI：10.31635/ccschem.023.202303616 · 被引用次数：36 · 研究领域：Organometallic Compounds Synthesis and Characterization、Thermal and Kinetic Analysis

Open AccessCCS ChemistryRESEARCH ARTICLES24 Jan 2024Effect of Free Radicals on Irradiation Chemistry of a Double-Coordination Organotin (Sn4) Photoresist by Adjusting Alkyl Ligands Hao Chen, Yifeng Peng, Haichao Fu, Fuping Han, Guangyue Shi, Feng Luo, Jun Zhao, Danhong Zhou, Pengzhong Chen and Xiaojun Peng Hao Chen State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian 116024 , Yifeng Peng State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian 116024 , Haichao Fu Research and Development Center of Valiant Co., Ltd., YEDA, Yantai 264006 , Fuping Han State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian 116024 , Guangyue Shi School of Materials Science and Engineering, Nankai University, Tianjin 300350 , Feng Luo School of Materials Science and Engineering, Nankai University, Tianjin 300350 , Jun Zhao Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201203 , Danhong Zhou State Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian 116024 , Pengzhong Chen *Corresponding authors: E-mail Address: [email protected] E-mail Address: [email protected] State K...