Effect of temperature on the ductile-to-brittle transition in laser-assisted mechanical ruling of silicon

作者：Dong Yao, Guangfeng Shi, Siwei Meng · 发表于：Materials Science in Semiconductor Processing · 年份：2024 · DOI：10.1016/j.mssp.2023.108101 · 被引用次数：12 · 研究领域：Advanced Surface Polishing Techniques、Force Microscopy Techniques and Applications、Laser Material Processing Techniques