Optimization and fabrication of chromium grating in self-traceable interferometer

作者：Zichao Lin, Yulin Yao, Zhangning Xie, Dongbai Xue, Tong Zhou, Zhaohui Tang, Lihua Lei, Tao Jin, Xiong Dun, Xiao Deng, Xinbin Cheng, Tongbao Li · 发表于：Precision Engineering · 年份：2023 · DOI：10.1016/j.precisioneng.2023.12.008 · 被引用次数：20 · 研究领域：Advanced Measurement and Metrology Techniques、Surface Roughness and Optical Measurements、Adhesion, Friction, and Surface Interactions