Dual-jump amplification in an electric-thermal adjusted arch beam micro-resonator

作者：Zunhao Xiao, Zhan Shi, Xuefeng Wang, Xueyong Wei, Ronghua Huan · 发表于：Sensors and Actuators A Physical · 年份：2023 · DOI：10.1016/j.sna.2023.114925 · 被引用次数：18 · 研究领域：Mechanical and Optical Resonators、Advanced MEMS and NEMS Technologies、Acoustic Wave Resonator Technologies