Advanced thin films of indium-tin oxide doping with photosensitive polymer via embossing process

作者：Jin Young Oh, Dong‐Hyun Kim, Da‐Bin Yang, Bo-Kyeong Choi, Dong Wook Lee, Hong‐Gyu Park, Dae‐Shik Seo · 发表于：Optics Express · 年份：2023 · DOI：10.1364/oe.499964 · 被引用次数：4 · 研究领域：Nanofabrication and Lithography Techniques、Liquid Crystal Research Advancements、Thin-Film Transistor Technologies

We propose a sol-gel thin film formation process involving nanoimprint lithography. First, indium tin oxide was dissolved in 2-methoxyethanol at a ratio of 5:5 and the mixture were mixed with 10 wt% of a UV-curable. Subsequently, a polydimethylsiloxane sheet prepared by covering a silicon wafer with a polydimethylsiloxane mold was attached to a InSnO thin film to duplicate the nanostructure through UV irradiation exposure. The replicated nanostructured thin films formed about morphological and chemical composition changes on the surface, we progressed to x-ray photoelectron spectroscopy and atomic force microscopy analysis. Furthermore, atomic force microscopy image analysis showed superior patterned grooves for a UV exposure time of 3 min. A suitability test involving the measurement of the transmittance was performed for examining the suitability of the thin film for use in display devices.