Investigation of thermal annealing on the characteristics of Sc Al1−N thin films

作者：Chao Gao, Yao Cai, Yang Zou, Binghui Lin, Tingting Yang, Yaxin Wang, Yan Liu, Shishang Guo, Chengliang Sun · 发表于：Vacuum · 年份：2023 · DOI：10.1016/j.vacuum.2023.112669 · 被引用次数：12 · 研究领域：Acoustic Wave Resonator Technologies、GaN-based semiconductor devices and materials、Metal and Thin Film Mechanics