Microstructure design and optimization of high-sensitivity interdigital capacitive humidity sensor based on uncertainty analysis

作者：Dapeng Li, Aobei Chen, Rui Na, Jiaqi Jing, Chun Hu, Dezhi Zheng, Shuai Wang · 发表于：Measurement · 年份：2023 · DOI：10.1016/j.measurement.2023.113599 · 被引用次数：14 · 研究领域：Gas Sensing Nanomaterials and Sensors、Advanced Chemical Sensor Technologies、Air Quality Monitoring and Forecasting