Hydrophobic, anticorrosion, and frictional properties of F-DLC films prepared by magnetron sputtering

作者：Lu Ru, Yingru Wang, Jiajun Liu, Simin Tao, Jianrong Xiao · 发表于：Vacuum · 年份：2023 · DOI：10.1016/j.vacuum.2023.112567 · 被引用次数：24 · 研究领域：Diamond and Carbon-based Materials Research、Metal and Thin Film Mechanics、Tribology and Wear Analysis