Group-III nitride heteroepitaxial films approaching bulk-class quality

作者：Jiaming Wang, Nan Xie, Fujun Xu, Lisheng Zhang, Jing Lang, Xiangning Kang, Zhixin Qin, Xuelin Yang, Ning Tang, Xinqiang Wang, Weikun Ge, Bo Shen · 发表于：Nature Materials · 年份：2023 · DOI：10.1038/s41563-023-01573-6 · 被引用次数：71 · 研究领域：GaN-based semiconductor devices and materials、Acoustic Wave Resonator Technologies、Metal and Thin Film Mechanics