Fabrication of 4H-SiC piezoresistive pressure sensor for high temperature using an integrated femtosecond laser-assisted plasma etching method

作者：Chen Wu, Xudong Fang, Ziyan Fang, Hao Sun, Sheng Li, Libo Zhao, Bian Tian, Ming Zhong, Ryutaro Maeda, Zhuangde Jiang · 发表于：Ceramics International · 年份：2023 · DOI：10.1016/j.ceramint.2023.06.112 · 被引用次数：23 · 研究领域：Diamond and Carbon-based Materials Research、Laser Material Processing Techniques、Nanowire Synthesis and Applications