Wafer-patterned, permeable, and stretchable liquid metal microelectrodes for implantable bioelectronics with chronic biocompatibility

作者：Qiuna Zhuang, Kuanming Yao, Mengge Wu, Zhuogui Lei, Fan Chen, Jiyu Li, Quanjing Mei, Yingying Zhou, Qiyao Huang, Xin Zhao, Ying Li, Xinge Yu, Zijian Zheng · 发表于：Science Advances · 年份：2023 · DOI：10.1126/sciadv.adg8602 · 被引用次数：167 · 研究领域：Advanced Sensor and Energy Harvesting Materials、Neuroscience and Neural Engineering、Tactile and Sensory Interactions

Implantable bioelectronics provide unprecedented opportunities for real-time and continuous monitoring of physiological signals of living bodies. Most bioelectronics adopt thin-film substrates such as polyimide and polydimethylsiloxane that exhibit high levels of flexibility and stretchability. However, the low permeability and relatively high modulus of these thin films hamper the long-term biocompatibility. In contrast, devices fabricated on porous substrates show the advantages of high permeability but suffer from low patterning density. Here, we report a wafer-scale patternable strategy for the high-resolution fabrication of supersoft, stretchable, and permeable liquid metal microelectrodes (μLMEs). We demonstrate 2-μm patterning capability, or an ultrahigh density of ~75,500 electrodes/cm 2 , of μLME arrays on a wafer-size (diameter, 100 mm) elastic fiber mat by photolithography. We implant the μLME array as a neural interface for high spatiotemporal mapping and intervention of electrocorticography signals of living rats. The implanted μLMEs have chronic biocompatibility over a period of eight months.