Shaped vibration cutting: A novel fabrication method for mid-infrared relief gratings with controllable profiles

作者：Zhimeng Chen, Pingfa Feng, Jianfu Zhang, Feng Feng, Huawen Zhang, Jinhui Yu, Jianjian Wang · 发表于：Journal of Materials Processing Technology · 年份：2023 · DOI：10.1016/j.jmatprotec.2023.118007 · 被引用次数：17 · 研究领域：Advanced Surface Polishing Techniques、Optical Coatings and Gratings、Laser Material Processing Techniques