Evident thickness effect on structure and mechanical properties of molybdenum films

作者：Kun Hu, Xi Xu, Qiang Hu, Qin Li, J. Ma · 发表于：Thin Solid Films · 年份：2023 · DOI：10.1016/j.tsf.2023.139724 · 被引用次数：12 · 研究领域：Metal and Thin Film Mechanics、Advanced materials and composites、Diamond and Carbon-based Materials Research