Manipulating the optoelectronic characteristic of AZO films by magnetron sputtering power

作者：Yanfang Zhao, Wei Ding, Yuanbin Xiao, Ping Yang · 发表于：Vacuum · 年份：2023 · DOI：10.1016/j.vacuum.2023.111849 · 被引用次数：20 · 研究领域：ZnO doping and properties、Transition Metal Oxide Nanomaterials、Gas Sensing Nanomaterials and Sensors