Three-dimensional micro displacement sensor based on fiber SPR mechanisms

作者：Yong Wei, Chen Shi, Chunlan Liu, Chunbiao Liu, Xingkai Wang, Yixiong Tang, Rui Wang, Zhihai Liu · 发表于：Optics Express · 年份：2023 · DOI：10.1364/oe.481514 · 被引用次数：14 · 研究领域：Advanced Fiber Optic Sensors、Photonic and Optical Devices、Advanced MEMS and NEMS Technologies

Three fiber micro displacement sensors can be combined to realize three-dimensional (3D) displacement sensing, but the system is complex. In this paper, a 3D displacement sensor based on fiber SPR was proposed, which was composed of displacement fiber and sensing fiber. By cascading the eccentric dual-core fiber and graded multimode fiber, the displacement fiber was realized. The V-groove was processed in the vertical and horizontal directions of the graded multimode fiber, and the inclined SPR sensing areas were fabricated to realize the sensing fiber. A straight beam from the middle core of the displacement fiber contacted the vertical V-groove inclined plane of the sensing fiber to realize the Y axis (up and down) direction micro displacement, contacted the horizontal V-groove inclined plane of the sensing fiber to realize the Z axis (front and back) direction micro displacement sensing. An oblique beam from the eccentric core of the displacement fiber cooperated with the sensing fiber to realize the micro displacement sensing in the X-axis (left and right) direction. The testing results indicate that the fiber SPR 3D micro displacement sensor can sense micro displacement in the X axis, Y axis and Z axis, and the wavelength sensitivity is 0.148 nm/µm, -3.724 nm/µm and 3.543 nm/µm, respectively. The light intensity sensitivity is -0.0014a.u./µm, -0.0458a.u./µm and -0.0494a.u./µm, respectively. When adjusting the parameters of eccentric dual-core fiber, the larger the core d...