Effect of ionic oxygen concentration on properties of SiO2 and Ta2O5 monolayers deposited by ion beam sputtering

作者：Chang Chen, Yanzhi Wang, Jijun Feng, Zhihao Wang, Yu Chen, Yesheng Lu, Yuhui Zhang, Dawei Li, Yun Cui, Jianda Shao · 发表于：Optical Materials · 年份：2022 · DOI：10.1016/j.optmat.2022.113349 · 被引用次数：17 · 研究领域：Metal and Thin Film Mechanics、Advanced Fiber Laser Technologies、Diamond and Carbon-based Materials Research