Amorphous Carbon Films for Electronic Applications

作者：Ik‐Soo Kim, Chae‐Eun Shim, Sang Won Kim, Chang‐Seok Lee, Junyoung Kwon, Kyung‐Eun Byun, Unyong Jeong · 发表于：Advanced Materials · 年份：2022 · DOI：10.1002/adma.202204912 · 被引用次数：93 · 研究领域：Diamond and Carbon-based Materials Research、Graphene research and applications、Carbon Nanotubes in Composites

While various crystalline carbon allotropes, including graphene, have been actively investigated, amorphous carbon (a-C) thin films have received relatively little attention. The a-C is a disordered form of carbon bonding with a broad range of the CC bond length and bond angle. Although accurate structural analysis and theoretical approaches are still insufficient, reproducible structure-property relationships have been accumulated. As the a-C thin film is now adapted as a hardmask in the semiconductor industry and new properties are reported continuously, expectations are growing that it can be practically used as active materials beyond as a simple sacrificial layer. In this perspective review article, after a brief introduction to the synthesis and properties of the a-C thin films, their potential practical applications are proposed, including hardmasks, extreme ultraviolet (EUV) pellicles, diffusion barriers, deformable electrodes and interconnects, sensors, active layers, electrodes for energy, micro-supercapacitors, batteries, nanogenerators, electromagnetic interference (EMI) shielding, and nanomembranes. The article ends with a discussion on the technological challenges in a-C thin films.