A novel torsion instrument for miniaturized components based on the flexural pivot

作者：Dabiao Liu, Jianhui Hu, Hao Liu, Jiongjiong Hu, Tong Luo, Zhiya Zhang, Jian Lei, Peng Hu, Yanming Chen, Yuming He · 发表于：Measurement · 年份：2022 · DOI：10.1016/j.measurement.2022.112176 · 被引用次数：21 · 研究领域：Mechanical and Optical Resonators、Advanced MEMS and NEMS Technologies、Force Microscopy Techniques and Applications