Modeling the microscale contact status in chemical mechanical polishing process

作者：Lin Wang, Ping Zhou, Ying Yan, Dongming Guo · 发表于：International Journal of Mechanical Sciences · 年份：2022 · DOI：10.1016/j.ijmecsci.2022.107559 · 被引用次数：57 · 研究领域：Advanced Surface Polishing Techniques、Advanced machining processes and optimization、Diamond and Carbon-based Materials Research