SOFT LITHOGRAPHY

作者：Younan Xia, George M. Whitesides · 发表于：Annual Review of Materials Science · 年份：1998 · DOI：10.1146/annurev.matsci.28.1.153 · 被引用次数：4600 · 研究领域：Nanofabrication and Lithography Techniques、Microfluidic and Capillary Electrophoresis Applications、Innovative Microfluidic and Catalytic Techniques Innovation

Abstract Soft lithography represents a non-photolithographic strategy based on self-assembly and replica molding for carrying out micro- and nanofabrication. It provides a convenient, effective, and low-cost method for the formation and manufacturing of micro- and nanostructures. In soft lithography, an elastomeric stamp with patterned relief structures on its surface is used to generate patterns and structures with feature sizes ranging from 30 nm to 100 μm. Five techniques have been demonstrated: microcontact printing (μCP), replica molding (REM), microtransfer molding (μTM), micromolding in capillaries (MIMIC), and solvent-assisted micromolding (SAMIM). In this chapter we discuss the procedures for these techniques and their applications in micro- and nanofabrication, surface chemistry, materials science, optics, MEMS, and microelectronics.