Surface deformation, phase transition and dislocation mechanisms of single crystalline 6H-SiC in oblique nano-cutting

作者：Shuo Zhang, Xiao Cheng, Junyun Chen · 发表于：Applied Surface Science · 年份：2022 · DOI：10.1016/j.apsusc.2022.152944 · 被引用次数：43 · 研究领域：Advanced Surface Polishing Techniques、Silicon Carbide Semiconductor Technologies、Diamond and Carbon-based Materials Research